The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 20, 1993
Filed:
Jul. 28, 1992
Applicant:
Inventors:
Gregory W White, Cupertino, CA (US);
Glenn D Alexander, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B / ;
U.S. Cl.
CPC ...
34 15 ; 34 34 ; 34218 ;
Abstract
After a heated object such as a processed wafer is placed inside a load lock chamber in a vacuum condition, a specified limited amount of vent gas is introduced and the pressure inside the chamber is maintained at an intermediate level for a specified length of time so a to control its thermal gradient. After the specified length of time, the chamber is completely vented. Both software and hardware implementations are possible for this staged vent.