The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1993
Filed:
May. 28, 1991
Applicant:
Inventors:
Shoji Kamata, Hitachi, JP;
Shigeru Izumi, Tokyo, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
378143 ; 378144 ; 378125 ;
Abstract
An X-ray analysis apparatus has a charged particle beam generator, an X-ray generating target bombarded by the beam and a detector for X-rays from said target transmitted by a test piece. To improve the spatial resolution of the apparatus, the beam size is reduced at the target by locating the target outside a vacuum chamber of the beam generator by providing the target as a non-circular narrow track of X-ray generating material exposed at both surfaces of the target, and by providing the beam generator with a beam accelerator and means for reducing the beam diameter between the beam accelerator and the target.