The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1993
Filed:
Oct. 20, 1991
Applicant:
Inventor:
Jerry L White, Phoenix, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437184 ; 437 60 ; 437192 ; 437918 ; 437209 ;
Abstract
A method of fabricating a resistive conductive pattern on an aluminum nitride substrate includes forming a resistive chromium containing film on the aluminum nitride substrate and then forming a refractory metal layer on the resistive film. The resistive film and refractory metal layer are then patterned and one or more conductive layers may then be formed on the patterned refractory metal layer. Resistors may then be formed between conductive lines patterned from the layers. These resistors are formed from the resistive film.