The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 1993
Filed:
Jul. 12, 1991
Applicant:
Inventors:
Jean Landreau, Antony, FR;
Hisao Nakajima, Bagneux, FR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437129 ; 437227 ; 437235 ; 437908 ; 437966 ; 20429803 ; 20429804 ; 20429811 ; 20429828 ; 20419213 ;
Abstract
The present invention pertains to a method and apparatus for the deposition and measurement of anti-reflective coatings on non-resonating semiconductor laser amplifiers. Two faces (15-1, 15-2) of the amplifier (15) alternately receive the sputtered material in small quantities. The semiconducting structure is supplied with constant current (16) and the voltage (V) is measured at the terminals of the structure. When the coatings are deposited on both faces, the voltage increases and passes through a maximum corresponding to the reflectivity minimum at which point deposition of the coating is stopped. The two faces are treated in the same way with coatings of the same thickness.