The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 15, 1993
Filed:
Oct. 01, 1991
Applicant:
Inventors:
Tatsuji Ikegami, Otori-Higashi, JP;
Tetsuro Ohbayashi, Otori-Higashi, JP;
Keiichi Yoshida, Otori-Higashi, JP;
Masashi Iguchi, Tokyo, JP;
Assignee:
Osaka Vacuum, Ltd., Osaka, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F01D / ; F01D / ;
U.S. Cl.
CPC ...
415 551 ; 415 90 ;
Abstract
A vacuum pump includes a casing provided with an inlet port and an outlet port; a turbo molecular pump unit disposed in an uppermost section, with respect to a flow direction of the gas, of the casing; a peripheral groove vacuum pump unit disposed in a middle section of the casing; and a vortex vacuum pump unit disposed in a lowermost section, with respect to the flow direction of the gas, of the casing.