The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 1993
Filed:
Oct. 23, 1990
Applicant:
Inventors:
Jorge J Santiago-Aviles, Philadelphia, PA (US);
Donald H Berry, Philadelphia, PA (US);
Assignee:
Trustees of the University of Pennsylvania, Philadelphia, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; C04B / ;
U.S. Cl.
CPC ...
427226 ; 264 61 ; 501 12 ;
Abstract
An organometallic precursor mixture is formed containing desired components of a final ceramic. This precursor mixture is dissolved in an organic solvent. The dissolved mixture is then spin cast or otherwise evenly deposited onto a wafer substrate. Finally, the coated wafer substrate is annealed by a process of Rapid Thermal Annealing to produce a thin ceramic film and to remove any organic material. This process exhibits preferential crystal growth to produce a uniform thin film.