The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 1993
Filed:
Feb. 07, 1992
Ying Wang, San Dimas, CA (US);
Zhijiang Wang, San Dimas, CA (US);
Other;
Abstract
An optical scanning method is described in which a device essentially comprises a rotational optical system S and a working plane W fed in a predetermined direction. The optical system forms the image of a stationary point A at point B on the working plane W. The image point is scanned along a circular are by rotating the optical system around the rotational axis. In a preferred device, point A lies approximately on the rotational axis and point B lies off the rotational axis. And the circular arc generated by the scanning of point B is in the working plane approximately perpendicular to the rotational axis. A 2-dimensional scanning is completed by the rotation of the optical system around the rotational axis and the translation of the working plane in a predetermined direction, which is synchronized with the rotation of the optical system. When the radiation beam E propagates from point A to B, the device is for information writing in (e.g. lithography) and the working plane is a recording medium. When the radiation beam E propagates from the working plane to point A, the device is for information reading-out or pattern acquisition, in which a point detector is positioned right behind point A. This optical scanning method can be used in visible, UV, IR or soft x-ray waveband, providing, at the same time, large field of view, high resolution and very high data rate.