The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 1993
Filed:
May. 22, 1991
Applicant:
Inventors:
Claude J Sandroff, Tinton Falls, NJ (US);
Francoise S Sandroff, Tinton Falls, NJ (US);
Assignee:
Bell Communications Research, Inc., Livingston, NJ (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; C30B / ;
U.S. Cl.
CPC ...
437-8 ; 156601 ; 156626 ; 374131 ; 374161 ;
Abstract
A relatively simple optical monitoring technique is utilized to measure temperature within a processing chamber. A III-V direct-bandgap semiconductor is optically excited to emit photoluminescence (PL). Spectral resolution of the emitted PL provides a direct measure of the bandgap of the semiconductor. In turn, the temperature of the semiconductor is derived from the bandgap measurement.
Sandroff, Claude. (1993). Temperature measurement in a processing chamber using in-situ monitoring (U.S. Patent No. 5213985). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5213985
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile