The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 1993
Filed:
Jul. 30, 1991
Katsumasa Suyama, Hirakata, JP;
Tabai Espec Corp., Osaki, JP;
Abstract
A temperature control method for controlling a temperature in a chamber comprises the steps of: providing heating means which can select large and small heating powers for heating the chamber and refrigerating means for cooling the chamber; detecting a process temperature in the chamber; operating the heating means with a small heating power for attaining an intended set value when a detected temperature is equal to or higher than a lower tolerable deviation value, and operating the heating means with a large heating power when the detected temperature is lower than the lower tolerable deviation value; and operating the refrigerating means when the detected temperature is higher than an upper tolerable deviation value.