The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 11, 1993

Filed:

Feb. 24, 1992
Applicant:
Inventors:

John A Grisham, Rogersville, AL (US);

Frederick W Clarke, Madison, AL (US);

Charles R Christensen, Athens, AL (US);

John L Stensby, Madison, AL (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
2503381 ; 356367 ; 356370 ; 356368 ;
Abstract

A modulated Faraday rotation signal is produced by passing a linearly polarized laser beam through a semiconductor wafer sample in a modulated magnetic field that is induced in an electromagnet by a sine wave generator and driver coupled thereto. The rotation signal is normalized by dividing by a transmission signal produced by modulating the beam with a chopper that operates at a different frequency from the frequency of the driver. The result is a Faraday rotation measurement with high signal-to-noise ratio and compensation for laser drift in intensity.


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