The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 1993
Filed:
Apr. 03, 1992
Applicant:
Inventors:
Seitaro Matsuo, Kanagawa, JP;
Yoshinobu Takeuchi, Tokyo, JP;
Kazuhiko Komatsu, Kanagawa, JP;
Emi Tamechika, Kanagawa, JP;
Katsuhiro Harada, Tokyo, JP;
Yoshiaki Mimura, Kanagawa, JP;
Toshiyuki Horiuchi, Kanagawa, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 53 ; 355 67 ;
Abstract
According to this invention, illumination light for illuminating a mask on which a micropattern is drawn is inclined at an angle corresponding to a numerical aperture of an optical projection lens located below the mask with respect to an optical axis. The illumination light is obliquely incident on the mask to expose the micropattern on an object located below the optical projection lens.