The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1993
Filed:
Jul. 01, 1991
Applicant:
Inventor:
William E Quinn, Middlesex Boro, NJ (US);
Assignee:
Bell Communications Research, Inc., Livingston, NJ (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01J / ;
U.S. Cl.
CPC ...
356400 ; 356369 ; 356154 ;
Abstract
Alignment method and procedure for accurately determining the off-normal angle of incidence of an optical beam with a sample, for example, in ellipsometry. A diffraction grating is fabricated with a grating period chosen such that, when a laser beam irradiates the grating placed at the sample area, a beam is diffracted generally along the incoming laser beam. The laser is then angularly moved with respect to the grating until the two beams are auto-collimated, i.e., made coincident. The angle of incidence is then accurately determined from the laser wavelength and the grating period through well known equations.