The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1993
Filed:
May. 27, 1992
Applicant:
Inventor:
Issei Yokoyama, Kyoto, JP;
Assignee:
Horiba, Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324676 ; 3241 / ; 437-8 ;
Abstract
A method and apparatus of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS) includes maintaining the object at a constant temperature while applying a predetermined voltage pulse to the object at predetermined test locations. The capacitance is measured over a predetermined time period, and the measured capacitance is processed to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum: ##EQU1## wherein C is the capacitance and t is the time period.