The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1993
Filed:
Jun. 02, 1992
Herbert Naehring, Rodenbach, DE;
Leybold Aktiengesellschaft, Hanau, DE;
Abstract
In a pivoting air lock for the entry and/or exit of a substrate from one treatment chamber into an adjacent one or from atmospheric space into a chamber of lesser pressure, especially a slot air lock for a pass-through vacuum coating apparatus, with a flap-like valve plate (2) held in stationary bearings (11, 11a) and two closing motors (10, 10a) in active connection with the valve plate, the valve plate (2) is, with the interposition of two spring rods (5, 5a), linked to a valve beam (1) which in turn has two diametrically opposite journals (12, 12a) which are coupled for rotation with the shafts (18, 18a) of the motors (10, 10a), the shafts (18, 18a) of the motors (10, 10a) being brought in a pressure-proof manner through the wall (13, 13a) of the chamber (3).