The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1993
Filed:
Jan. 11, 1991
Benedict B O'Brien, Manhattan Beach, CA (US);
Brent E Burns, Torrance, CA (US);
John A Geen, Wrentham, MA (US);
Northrop Corporation, Hawthorne, CA (US);
Abstract
A miniature accelerometer is fabricated using integrated circuit manufacturing and silicon micromachining techniques to form a closed loop, force balance sensor utilizing a silicon proofmass formed from and connected to a layer of silicon by a split flexure etched therein. The sensor circuitry detects AC signals coupled from the proofmass to a pair of electrodes formed on glass surfaces anodically bonded to the silicon layer. A DC restorative force is applied to the electrodes in response to the detected AC signals to balance acceleration forces applied to the proofmass. The sensor design is highly symmetrical.