The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 1993
Filed:
Apr. 01, 1991
Applicant:
Inventors:
Chester J Blechinger, Bloomfield Hills, MI (US);
Paul E Stevenson, Livonia, MI (US);
Assignee:
Ford Motor Company, Dearborn, MI (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7320426 ;
Abstract
A flow sensor which includes a support structure including a base having a plurality of spaced mesas on a surface thereof is provided. A low thermal conductivity, dielectric diaphragm spanning the mesas is supported along its length thereby and forms an electrical and thermal insulation barrier over the support structure and the mesas. At least one flow sensing element is superposed on the diaphragm so that the flow sensing element is substantially electrically and thermally isolated from the support structure. A method for fabricating the flow sensor is also provided.