The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 1993
Filed:
Mar. 19, 1992
Applicant:
Inventor:
Takao Kakiuchi, Takarazuka, JP;
Assignee:
Matsushita Electronics Corporation, Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437187 ; 437194 ; 437197 ; 437962 ; 1566591 ; 156664 ; 156665 ;
Abstract
A method for patterning a metal layer without so-called 'rabbit ears' comprising the steps of: deposition of a metal layer on a substrate, deposition of a barrier layer on the metal layer, formation of a mask layer of a predetermined pattern on the barrier layer, etching of the barrier layer and the metal layer under conditions such that the mask layer is also eroded slightly, and removal of the mask layer. In other embodiments, selective etching of barrier layer and mask sidewalls avoids or eliminates such 'rabbit ears' and/or etchant product deposits which are precursors of such 'rabbit ears'.