The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 20, 1993

Filed:

Dec. 26, 1990
Applicant:
Inventor:

Richard H Lane, Hillsboro, OR (US);

Assignee:

North American Philips Corp., New York, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 31 ; 437162 ; 437909 ; 148D / ; 148D / ;
Abstract

A process for fabricating a compact bipolar transistor structure is disclosed which eliminates the need for a field oxide isolation region between the collector contact region and emitter of the transistor. An island of non-monocrystalline silicon is formed on top of the transistor structure partially covering the base and collector contact regions. Ribbons of non-insulating material are formed along the sidewalls of the island. The ribbon over the base region is employed to form a narrow emitter region with an annealing step that drives dopant from the ribbon or island into the portion of the base region below the ribbon. An insulating layer is disposed between the transistor structure and the island and ribbon over the collector contact region to insulate the emitter from the collector. Insulating sidewall spacers are formed next to the sidewall ribbons to insulate silicide regions grown over the base region, island and collector contact region for the three transistor contacts.


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