X-ray monochromator and spectral measurement apparatus using the x-ray

Abstract

An x-ray monochromator is composed of a semiconductor perfect single crystal serving as a monochromator and a solid state detector for measuring and/or counting the incident x-ray photons of an x-ray beam which enters the semiconductor single crystal, the solid state detector being disposed integrally with the semiconductor perfect single crystal on a side opposite to an x-ray beam incident side thereof. A spectral measurement apparatus for measuring the structure of a specimen with application of an x-ray beam and measuring the absorption of the x-ray beam by the specimen or the reflection of the ray-ray beam from the specimen is composed of a first x-ray monochromator including a U-shaped perfect single crystal, at least one second x-ray monochromator, which is identical to the above mentioned x-ray monochromator, a first driving device for rotating the first x-ray monochromator, a second driving device for rotating the second x-ray monochromator, and a control device for differentiating signals from the solid state detector, and controlling the second driving means to locate the second x-ray monochromator at a rotated position where the differential coefficient obtained by the differentiation changes from a positive value to a negative value, and the intensity of the x-ray beam which enters second x-ray monochromator is maximized.