The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1993
Filed:
Aug. 22, 1991
Robert J Champetier, San Pedro, CA (US);
EOS Technologies, Inc., Santa Monica, CA (US);
Abstract
A surface contamination monitor which discriminates between different types of surface contamination and irregularities is provided with a horizontal sensing plate, a light detector positioned under the plate, a narrow bandpass filter disposed between the plate and the detector, and optical lenses. At one end of the sensing plate is included three laser diodes, while at the other end is located a coupling prism. Beams from the laser diodes strike the coupling prism and are directed at different angles so as to either strike the exposed surface of the sensing plate or become trapped within the sensing plate. Variations in the reactions of the different beams to different contaminants and irregularities on the exposed sensing plate surface allow the light detector to discriminate between dust, molecular films , and scratches and craters on the exposed surface.