The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 1993
Filed:
May. 07, 1991
Applicant:
Inventor:
Gary C Davis, Albany, NY (US);
Assignee:
MicroSi, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ; G03C / ;
U.S. Cl.
CPC ...
430273 ; 430339 ; 430156 ; 430509 ; 430502 ; 430517 ; 430928 ; 430325 ; 430326 ; 430396 ; 524186 ;
Abstract
Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.
Davis, Gary. (1993). Spin castable mixtures useful for making deep-uv contrast enhancement (U.S. Patent No. 5196295). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5196295
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile