The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1993
Filed:
Sep. 27, 1991
Osamu Kuwabara, Yokohama, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
An X-ray exposure apparatus comprises an X-ray beam generating source and an exposure apparatus body including an alignment optical system. The exposure apparatus body is set independently from the X-ray beam generating source and the exposure apparatus body is located to be swingable wtih respect to the base such as a floor, through the elastic member. Thereafter, the exposure apparatus body is raised by a raising mechanism, for example, comprising a plurality of vertically expandable air cushions, in a floating manner. A height position and an inclination of the exposure apparatus body are adjusted by controlling the raising mechanism individually so that the axis of the X-ray beam generated from the X-ray source substantially coincides with the optical axis as measurement reference of the alignment optical system. The exposure apparatus body is then secured to this adjusted position by means of the securing mechanism comprising adjusting bolts and clamping bolts, for example.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile