The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 1993
Filed:
Jun. 07, 1991
Applicant:
Inventors:
Jeffrey B Bindell, South Whitehall Township, Lehigh County, PA (US);
James T Cargo, Bethlehem, PA (US);
Ronald J Holmes, Greenwich Township, Berks County, PA (US);
Michael C Hughes, Lehigh Township, Northampton County, PA (US);
Assignee:
AT&T Bell Laboratories, Murray Hill, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C03C / ; C03C / ;
U.S. Cl.
CPC ...
156628 ; 156656 ; 156657 ; 156667 ; 65 301 ; 65 3013 ; 65 31 ;
Abstract
Oxides of tantalum and niobium are selectively etched using patterned silicon oxide deposited by a low-temperature chemical vapor deposition as a mask and a sulfate flux to selectively remove exposed portions of the tantalum or niobium oxide substrate.