The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1993
Filed:
Jun. 26, 1991
Applicant:
Inventors:
Arthur E Dixon, Kitchener, Ontario, CA;
Savvas Damaskinos, Kitchener, CA;
John W Bowron, Waterloo, CA;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J / ; G01J / ; G01N / ;
U.S. Cl.
CPC ...
356326 ; 356318 ; 356328 ; 356334 ; 356346 ; 2504581 ;
Abstract
A scanning optical microscope or mapping system for spectrally-resolved measurement of light reflected, emitted or scatttered from a specimen is disclosed, in which the spectrally-resolving element is integrated into the detection arm of the microscope or mapping system to result in good photon collection efficiency as well as good spectral and spatial resolution. A confocal version of the microscope is disclosed which will be of particular interest in fluorescence microscopy, and the non-confocal mapping system will be of particular interest in photoluminescence mapping of semiconductor wafers.