The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1993
Filed:
Dec. 13, 1991
Applicant:
Inventor:
Gotz Teschner, Gelnhausen, DE;
Assignee:
Leybold Aktiengesellschaft, Hanau, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H / ;
U.S. Cl.
CPC ...
31511121 ; 31323131 ; 31323141 ; 20429841 ;
Abstract
The invention relates to a circuit configuration for the suppression of arcs in a plasma wherein to the plasma path (5, 7, 8) a voltage (11) is applied. The instantaneous value of the voltage of the plasma path (5, 7, 8) is compared with a mean value of the voltage which has been determined over a given period of time. If the difference between the instantaneous value and mean value exceeds a given amount, the plasma path (5, 7, 8) is isolated from the voltage (11).