The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1993
Filed:
Oct. 12, 1990
Applicant:
Inventors:
Robert M Boysel, Plano, TX (US);
Jeffrey B Sampsell, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 156656 ; 156645 ;
Abstract
It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.