The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 1993
Filed:
May. 18, 1990
Applicant:
Inventors:
Yasushi Muranaka, Katsuta, JP;
Hisao Yamashita, Hitachi, JP;
Akira Kato, Hitachi, JP;
Hiroshi Miyadera, Hitachi, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
156610 ; 156613 ; 156D / ; 437106 ; 26415744 ; 26419225 ;
Abstract
A method for growing a thin film on a substrate of metal or ceramics by beam deposition comprising the steps of: