The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 1993
Filed:
Jun. 01, 1990
Applicant:
Inventors:
Stephen D Etienne, Hayes, GB;
Donald C Young, Pangbourne, GB;
Assignee:
Thorn EMI plc, London, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7386175 ;
Abstract
A flow sensing device includes a semiconductor substrate 31 and a pivoted beam 1. Below one half of the beam is a channel 7 running throughout the substrate 31, and below the other half of the beam is a cavity 8. During operation, a differential force exists across the beam, and the amount of force required to compensate for this differential force is indicative of the rate of fluid flow.