The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 1993
Filed:
May. 20, 1992
Applicant:
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 48 ; 437 60 ; 437982 ; 437984 ;
Abstract
In a semiconductor integrated circuit device having at least three conductor layers, a connection hole for the lower conductor layer and the upper conductor layer can be formed in self-alignment to the intermediate conductor layer after flattening the underlying insulation film for the upper conductor layer and deterioration of the insulation withstand voltage between the upper conductor layer and the intermediate conductor layer can be prevented.