The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 02, 1993
Filed:
Nov. 20, 1989
Leslie E Carpenter, Midland, MI (US);
Dow Corning Corporation, Midland, MI (US);
Abstract
Ceramic or ceramic-like single, two, or multilayer coatings having aluminum nitride as one of the layers are provided, including methods for the preparation of such coatings which produce planarizing, passivating and hermetic barrier coatings on temperature sensitive substrates such as semiconductors and electronic devices. The aluminum nitride ceramic or ceramic-like coating is provided by applying a liquid alkylaluminum amide having the formula (R.sub.2 AlNH.sub.2).sub.3, where R is an alkyl group containing from 1 to 4 carbon atoms, neat or diluted in an organic solvent. The liquid coating is then dried, followed by heating the coating to a temperature of between about 400.degree. to about 100.degree. C. in the presence of ammonia to produce an aluminum nitride-containing ceramic coating.