The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 26, 1993

Filed:

Apr. 08, 1992
Applicant:
Inventors:

Marko Sokolich, Los Angeles, CA (US);

Zaher Bardai, Torrance, CA (US);

Assignee:

Hughes Aircraft Company, Los Angeles, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
445 24 ; 156656 ; 1566611 ; 445 50 ;
Abstract

A field emission device employs an anode in the form of an air bridge spanning the tip of a field emission cathode. The anode is supported only at its opposite ends, leaving the area under the air bridge open. An array of cathode emitters employ a series of parallel, laterally spaced anode air bridges, with each air bridge spanning a line of cathodes. The lateral spacing between the air bridges facilitates both the removal of underlying photo-resist during fabrication, and the establishment of a uniform vacuum if desired. The clearance between the anode and cathode is substantially less than previously obtainable, resulting in a significant reduction in both size and in the anode's operating voltage level. Fabrication of the air bridge anodes can be integrtaed with the remainder of an integrated circuit.


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