The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 26, 1993
Filed:
Sep. 20, 1991
Applicant:
Inventor:
John L Hughes, Rodeo, CA (US);
Assignee:
Intevac, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F23F / ;
U.S. Cl.
CPC ...
165 801 ; 165 802 ; 165 805 ; 16510434 ; 165903 ; 16510432 ; 118724 ;
Abstract
A method and apparatus are disclosed using a combination of convection and conduction cooling to cool an article in an evacuated environment. A processing chamber is used which includes at least one heat sink. A flat surface of the article to be cooled is positioned within the chamber in a spaced apart facing parallel relationship to a facing surface of the heat sink. High conductivity gases are admitted into the chamber to accomplish cooling of the article.