The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 19, 1993
Filed:
May. 02, 1991
Applicant:
Inventors:
Rudolf Wagner, Fontnas, CH;
Hans Hirscher, Bad Ragaz, CH;
Assignee:
Balzers Aktiengesellschaft, Furstentum, LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F28F / ; C23C / ; B25B / ;
U.S. Cl.
CPC ...
165 801 ; 269 21 ; 118725 ; 118728 ;
Abstract
For the transmission of heat under vacuum conditions to a workpiece, a carrier is used with gas outlets and gas return openings distributed on its surface. A dynamic gas layer is thus formed between the carrier and the workpiece wherein the gas effects thermal conduction between the carrier and the workpiece. The gas outlets terminate in a distribution space implemented as a groove and has at least on slot shaped aperture extending substantially around most of the carrier periphery.