The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 1993
Filed:
Nov. 16, 1990
Shoichi Washizuka, Yokohama, JP;
Takao Ohta, Tokyo, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A semiconductor wafer evaluation apparatus, wherein a conductivity detector and a carrier mobility detector are independently arranged so that detections can be made under optimum conditions, respectively. A wafer carrying unit is arranged so as to carry or convey a semiconductor wafer on a carrying path between the two detectors. These components are controlled by a controller. A carrier concentration is calculated from the conductivity and the carrier mobility detected by both detectors. When a partition wall for preventing interference of an electromagnetic wave is provided between the conductivity detector and the carrier mobility detector, interference between the two detectors is further reduced.