The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1993
Filed:
Jan. 22, 1991
Paul R Norton, Santa Barbara, CA (US);
William A Radford, Santa Barbara, CA (US);
Santa Barbara Research Center, Goleta, CA (US);
Abstract
A method for fabricating a plurality of semiconductor photodetectors and an array of same produced by the method. The method includes a first step of selectively removing semiconductor material to form a channel within a semiconductor material for physically isolating a first photodetector from a second photodetector, the semiconductor material having a characteristic energy bandgap. The method includes a second step of selectively increasing the carrier concentration of the semiconductor material within a bottom region of the channel for preventing minority charge carriers from diffusing under the channel from a region associated with the first photodetector to a region associated with the second photodetector. The step of selectively removing is accomplished by the steps of providing a patterned mask upon the semiconductor material and selectively removing the underlying semiconductor material through an opening within the mask. The step of selectively increasing the carrier concentration includes a step of ion implanting the semiconductor material through the opening within the mask.