The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 1993
Filed:
Apr. 17, 1991
Takahide Ishikawa, Itami, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A compound semiconductor MIS FET includes a channel layer produced on a semi-insulating substrate with an intervening buffer layer, source and drain electrodes produced directly on a predetermined region of the channel layer, and a Schottky barrier gate electrode produced on the channel layer between the source and drain ohmic electrodes and on an undoped semiconductor layer. A production method for such a compound semiconductor MIS FET includes removing by etching undoped semiconductor layer at source and drain electrode production regions to expose a channel layer existing therebelow before producing the source and drain electrodes, and producing ohmic electrodes on the exposed channel layer and producing a Schottky barrier gate electrode between the source and drain electrodes on the undoped layer.