The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1992
Filed:
Nov. 08, 1991
Applicant:
Inventors:
Taiji Ema, Kawasaki, JP;
Hisatsugu Shirai, Kawasaki, JP;
Katsuyoshi Kobayashi, Kawasaki, JP;
Masao Taguchi, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437229 ; 437 47 ; 437 52 ; 437228 ;
Abstract
A method for fabricating a semiconductor device comprises the steps of defining a plurality of regions on a substrate, exposing a first pattern that extends over a plurality of such regions such that the first pattern is exposed on the plurality of regions simultaneously, and exposing a plurality of second patterns that are identical in size and shape and isolated from each other, consecutively for each of the plurality of regions.