The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1992
Filed:
Sep. 30, 1991
Applicant:
Inventors:
Andrew J Purdes, Garland, TX (US);
Francis G Celli, Dallas, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427573 ; 427249 ; 4272551 ; 427314 ; 4273722 ;
Abstract
A microwave plasma rector is disclosed comprising a vacuum chamber, a microwave generator for generating a microwave standing wave therein, inlet and outlet ports, a susceptor within the chamber, at least one dielectric plate and a heater for heating the susceptor. The dielectric plate alters the shape of the produced plasma from a sphere to a short bulging cylinder. The modified plasma ball results in increased thickness uniformity of the deposited material.