The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1992
Filed:
Jun. 04, 1991
Applicant:
Inventors:
Hiroshi Yamamoto, Chiba, JP;
Kazuyuki Sawada, Hirakata, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; B44C / ; C23F / ; C03C / ;
U.S. Cl.
CPC ...
156643 ; 156644 ; 156651 ; 156653 ; 156656 ; 156657 ; 1566591 ; 156662 ; 257301 ; 257758 ; 437 52 ; 437189 ; 437203 ; 437245 ;
Abstract
A method of forming a contact structure comprising a first step whereby a contact hole is formed with an etching stopper film by way of self-alignment, a second step whereby the etching stopper film is removed from the contact hole, and a third step of metallization, whereby unnecessary intermediate film layers are removed from the connected regions.
Yamamoto, Hiroshi. (1992). Method of forming contact structure (U.S. Patent No. 5174858). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5174858
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile