The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 1992
Filed:
Apr. 03, 1992
Applicant:
Inventors:
Carlo Misiano, Rome, IT;
Enrico Simonetti, Rome, IT;
Assignee:
Consorzio Ce.Te.V Centro Tecnologie del Vuoto, Carsoli-l'Aquila, IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118719 ; 118704 ; 118707 ; 118715 ;
Abstract
An apparatus for thin layer vapor deposition has two horizontally spaced apart vacuum deposition chambers. Rearwardly and inwardly angled horizontal vacuum ducts are connected to the chambers, and a vacuum pumping device is connected to a further horizontal vacuum duct which communicates with the inwardly angled ducts. A computerized central system disposed between the chambers is operatively connected to the ducts and vacuum pumping device to enable either of the chambers to be used for set-up and evacuation while the other chamber is used for heating and deposition.