The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 1992
Filed:
Feb. 15, 1991
Applicant:
Inventor:
Mavin Swapp, Mesa, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; B44C / ;
U.S. Cl.
CPC ...
3241 / ; 324 725 ; 439482 ; 156653 ;
Abstract
A semiconductor probe card having a plurality of micromachined probes tips for contacting an array of electrode pads formed on a semiconductor integrated circuit is provided. The plurality of probe tips are formed on the top surface of the substrate wherein the probe tips are arranged in an array matching of electrode pads on the integrated circuit to be tested. A portion of the semiconductor substrate underneath the probe tips is thin, so that the probe tips rests on a flexible diaphragm or beam.