The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 1992
Filed:
May. 21, 1991
Applicant:
Inventors:
James W Hillendahl, Vacaville, CA (US);
J Glen Palmer, Concord, CA (US);
Assignee:
The BOC Group, Inc., New Providence, NJ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419212 ; 20419215 ; 20419229 ; 20429812 ; 20429813 ; 20429822 ;
Abstract
Alloys useful for preparing self-supporting cylindrical targets are provided. The alloys comprise zinc and one or more other metals chosen from the following: aluminum, bismuth, cerium, gadolinium, hafnium, niobium, silicon, tantalum, titanium, vanadium, yttrium, and zirconium. In one preferred embodiment, a zinc alloy with approximately 2% aluminum forms self-supporting cylindrical targets from which metal oxide films are prepared by reactive sputtering. The alloy oxide films are clear, transparent, non-absorbing, and optically functional.