The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 1992
Filed:
May. 09, 1991
Applicant:
Inventors:
Rudolf Latz, Rodgau, DE;
Michael Schanz, Rodgau, DE;
Michael Scherer, Rodenbach, DE;
Joachim Szczyrbowski, Goldbach, DE;
Assignee:
Leybold Aktiengesellschaft, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429803 ; 20419213 ; 20429807 ; 20429808 ; 20429818 ; 20429819 ;
Abstract
A pair of magnetron cathodes in an evacuable coating chamber are each connected to an ungrounded output of an A.C. power supply. The discharge voltage of at least one of the cathodes is measured and the flow of reactive gas into the chamber is controlled so that the measured voltage is identical to a desired voltage.