The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 1992
Filed:
Mar. 16, 1992
Applicant:
Inventors:
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118723 ; 118729 ; 427571 ; 427577 ; 427575 ;
Abstract
Diamond-like thin films having high uniformity and high crystallinity are produced by introducing a hydrocarbon material gas into a chamber, ionizing the gas, and depositing the ionized gas on a substrate. The gas is ionized by thermionic emission from two or more files of hot cathodes, each file having a plurality of filaments arranged at substantially uniform intervals in a linear or zigzag line configuration. Each file of hot cathodes is surrounded separately by an anode at a substantially uniform distance from a respective file of the filaments.