The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 1992
Filed:
May. 09, 1991
Rudolf Latz, Rodgau, DE;
Leybold Aktiengesellschaft, Hanau, DE;
Abstract
In an apparatus for coating a substrate (1) with electrically conductive materials (2), comprising a direct-current and/or an alternating-current source (10 and 38, respectively), which is connected to an electrode disposed in an evacuable coating chamber (15, 15a, 15b) electrically connected with a target (3, 32) which is sputtered and whose sputtered particles deposit themselves on the substrate (1), a process gas can be put into the coating chamber (15, 15a, 15b), toroidal magnetic fields pass through the target and their lines of force issue from the surface of the target (3) at the magnet poles, the target (3) has a substantially elongated, flat, oval shape and is furthermore surrounded by a dark-space shield (34) whose circumferential edge facing the substrate (1) slightly overreaches the front surface of the cathode tub (4), while the magnet system held on a yoke (6) and disposed in the cathode tub (4) is formed of a middle series of narrow magnets (8) extending in the direction of the length of the target, an additional series of narrow magnets (7, 9) disposed on the marginal part of the yoke (6), and two round magnets which are situated one on each end of the middle series of magnets (8).