The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 1992
Filed:
Mar. 09, 1992
Shigeru Noguchi, Tokyo, JP;
Yasushi Kawai, Tokyo, JP;
Dai Nippon Printing, Tokyo, JP;
Abstract
An ion beam I is irradiated from an ion gun 10 onto a sample S on an XY stage 100, and an electron shower E is irradiated onto the sample S. Electrification of the sample by ion is neutralized by irradiation of the electron shower E. In the case of adjusting the electron shower E, a drive system 200 is driven by a control signal from a control unit 300 to scan a spot of the electron shower E by a Faraday cup F positioned at a corner of the XY stage 100. Detected current values of the Faraday cup F at respective scanning positions are amplified at an amplifier 210. The current values thus amplified are digitized at an A/D converter 220, and are then delivered to the control unit 300. The control unit 300 displays the intensity distribution of the electron shower E obtained by this scanning on a display unit 400.