The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 1992
Filed:
Mar. 22, 1991
Applicant:
Inventor:
William M Ayers, Princeton, NJ (US);
Assignee:
Electron Transfer Technologies, Inc., Princeton, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25B / ; C25B / ;
U.S. Cl.
CPC ...
204101 ; 204103 ; 204230 ; 204242 ; 204284 ; 204291 ; 204292 ; 204293 ; 2042 / ;
Abstract
An electrochemical apparatus and method for supplying volatile hydrides of sufficient purity, at the proper pressure, and in the required volume, for direct introduction into a chemical vapor deposition reactor in which semiconductors are manufactured and doped.