The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 1992
Filed:
Feb. 15, 1991
Applicant:
Inventor:
Seiji Takemura, Itami, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Itami, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; G01B / ; G01L / ;
U.S. Cl.
CPC ...
357 26 ; 357 27 ; 73777 ; 73778 ;
Abstract
A semiconductor acceleration sensor and a method of producing the sensor are characterized in that a pedestal on which a semiconductor acceleration sensor chip including a weight is mounted is integral with a stopper for preventing movement of the weight outside a prescribed range. The semiconductor acceleration sensor is not broken even if an acceleration outside the measurement range is applied. In addition, the semiconductor acceleration sensor exhibits high accuracy and is low in cost.