The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 1992
Filed:
Jun. 03, 1991
Applicant:
Inventors:
James M O'Connor, Ellicott City, MD (US);
John B McKitterick, Columbia, MD (US);
Assignee:
Allied-Signal Inc., Morris Township, Morris County, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 86 ; 437901 ; 437966 ; 437974 ; 437927 ; 148D / ; 148D / ; 357 26 ; 73754 ;
Abstract
A method for fabricating an all silicon absolute pressure sensor employing silicon-on-insulator structures. More particularly, a method for fabricating an all silicon absolute pressure sensor based upon an ungated metal-oxide semiconductor field-effect transistor which offers a high degree of immunity to temperature effects, increased reliability, minimal substrate parasitics, reduced manufacturing variations from device to device, as well as inexpensive and simple fabrication.