The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 1992
Filed:
Feb. 28, 1992
Applicant:
Inventors:
Hitoshi Shindo, Atsugi, JP;
Takeshi Ichikawa, Atsugi, JP;
Osamu Ikeda, Yokohama, JP;
Kazuaki Ohmi, Hadano, JP;
Shigeyuki Matsumoto, Atsugi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427253 ; 427252 ; 4272552 ; 427264 ; 427265 ; 427270 ; 427271 ; 437 51 ; 437228 ; 437235 ; 437243 ; 437245 ;
Abstract
A process for forming an additive-containing Al film of good quality according to the CVD method utilizing an alkyl aluminum hydride, a gas containing an additive and hydrogen, which is an excellent deposited film formation process also capable of selective deposition of additive-containing Al.
Shindo, Hitoshi. (1992). Process for forming metal deposited film containing aluminum as main (U.S. Patent No. 5154949). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5154949
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile